Samco was the first of Japan's semiconductor process equipment manufacturers to obtain a Bosch Process license. Using our latest patented Tornado ICP® technology and harnessing the Bosch Process, Samco's Si DRIE systems have proven effective in deep, vertical, high-speed Si deep etching for both R&D and production. Also, Samco developed high precision processing at the nano level using ICP etching and RIE systems.

Deep Si etching (bosch process)

Deep Si etching (non bosch process)

Si, Poly-Si, SiN etching