Aqua Plasma® Cleaner is a plasma processing equipment that mainly uses water vapor (H₂O). These systems can perform safe and environmentally friendly surface treatments such as oxide reduction, organic contaminants cleaning, resin bonding, and superhydrophilization.
Aqua Plasma® Cleaner AQ-2000
for large size substrates
Samco's Plasma Cleaners are a parallel-plate system to clean organic and inorganic contamination from the surface of samples. The process chamber allows the user to install multiple electrode shelves, and the flexibility of the shelf electrode configuration supports batch processing of a wide range of products, from research to high volume production.
Samco's UV Ozone Cleaners use a unique combination of ultraviolet irradiation, ozone, and stage heating to gently, yet effectively, remove organic materials from a variety of substrates, including silicon, glass, compound semiconductors (GaN, SiC, GaAs, and InP), sapphire, ceramics, etc. Today our product line includes, compact benchtop and cassette type systems for both R&D and mass production customers.
UV Ozone Cleaner UV-1
Compact benchtop system
UV Ozone Cleaner UV-300
Rotating stage ensure uniformity
UV Ozone Cleaner UV-300H
Ashing rates of >200 nm/min
Cassette Loading UV Ozone Cleaner UV-300HC