Bosch Process
The RIE-400iPB is used to make Si molds for thermal imprinting of 1 µm square and 5 µm high.
Photo courtesy of Yamagata research institute of technology
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ProcessesImprinting mold fabrication
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The RIE-400iPB is used to make Si molds for thermal imprinting of 1 µm square and 5 µm high.
Photo courtesy of Yamagata research institute of technology