Atomic Layer Deposition (ALD) Systems
Atomic layer deposition (ALD) is a thin-film growth technology that is capable of depositing pinhole-free and uniform insulator films for electronic devices (Power and RF). ALD offers exceptional conformality on the high-aspect-ratio trench and via structures, thickness control at the angstrom level, and tunable film composition based on sequential, self-limiting reactions. Samco provides a highly flexible open-loaded thermal ALD system AL-1 and loadlock plasma-enhanced ALD system AD-230LP.
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電漿輔助ALD系統 AD-230LP
極佳的再現性及穏定性
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熱原子層沉積(Thermal ALD)系統 AL-1
無針孔薄膜沉積
Plasma Enhanced CVD Systems
Plasma Enhanced Chemical Vapor Deposition (PECVD) is a technology to form a thin film by generating active radicals and ions on a target substrate by turning a reactive gas into a plasma state and causing a chemical reaction on the target substrate to be deposited. It is used to deposit silicon nitride film (SiN) as a passivation film and silicon oxide film (SiO₂) as an interlayer insulating film in the manufacturing process of compound semiconductors and silicon semiconductors.
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電漿增強化學氣相沉積(CVD)系統 PD-220NL
適合R&D的小體積Loadlock系統
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電漿增強化學氣相沉積(CVD)系統 PD-2201LC
省空間的量產系統
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電漿增強化學氣相沉積(CVD)系統PD-3800L
Tray承載盤為主的批次處理製程
Liquid Source CVD Systems
The Liquid Source CVD Systems is a low-temperature (80 ~ 400°C), high-rate (>300 nm/min) plasma enhanced CVD system for R&D. Samco's unique LSCVD system uses self-bias deposition techniques and a TEOS to deposit SiO2 films with low stress, from thin films to extremely thick films (up to 100 µm).
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液態源沉積(LS-CVD)系統PD-200STL
Loadlock尺寸ø200 mm
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液態源沉積(LS-CVD)系統 PD-270STLC
Cassette loading(自動晶盒傳送)系統
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液態源沉積(LS-CVD)系統 PD-330STC
最大可處理ø300 mm晶圓
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液態源沉積(LS-CVD)系統 PD-100ST
R&D專用的直開式(Open-load)系統
Diamond-Like Carbon (DLC) Coating Systems
Diamond-like carbon (DLC) coating is a process of depositing a DLC film on a substrate by plasma enhanced chemical vapor deposition (CVD). Samco's DLC coating process allows the formation of dense films using high ion energy. This film has a high barrier performance.
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類鑽石膜(Diamond-like Carbon，DLC)沉積系統PD-100D
專爲類鑽石(DLC)膜的沉積
