Plasma Cleaning Systems
Samco's Plasma Cleaners are a parallel-plate system to clean organic and inorganic contamination from the surface of samples. The process chamber allows the user to install multiple electrode shelves, and the flexibility of the shelf electrode configuration supports batch processing of a wide range of products, from research to high volume production.
Key Features and Benefits
Both R&D and mass production customers around the world use the reliable Samco plasma cleaners. Our plasma cleaners have small footprint and are capable of batch processing of samples/wafers using multiple shelves. The PC-300 and PC-1100 are tabletop plasma cleaning systems using parallel-plate direct plasma. The systems can be used to clean organic and inorganic contamination from the surface of samples such as plastic packages, LCD substrates, multi-chip modules and hybrid ICs. Other applications include photoresist ashing, ink removal, surface activation and wettability improvement. The PC-300 and PC-1100 are fully automatic systems with a user-friendly touchscreen. The process chamber enables the user to install multiple sample shelves, and the high degree of flexibility in configuration supports batch processing of a wide degree of products from small electronic components to larger substrates.