Aqua Plasma® Cleaners
Aqua Plasma® Cleaner is a plasma processing equipment that mainly uses water vapor (H₂O). These systems can perform safe and environmentally friendly surface treatments such as oxide reduction, organic contaminants cleaning, resin bonding, and superhydrophilization.
Aqua Plasma® Cleaner AQ-2000
for large size substrates
Key Features and Benefits
The AQ-Series are a plasma cleaner specially designed for Aqua Plasma treatment which uses H2O as process gas.
These systems are capable of polymer surface treatment and bonding for microfluidics fabrication. Furthermore, the system offers metal surface cleaning without surface oxidation and redeposition which are typical process challenges in conventional O2 or Ar plasma treatment. The unique process is suitable for copper/silver leadframe and electrode cleaning in microelectronics packaging.