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予稿集の内容は以下の通りです。
【Contents】
1. MEMS - Past, Present and Future -
Department of Micro Engineering, Graduate School of Engineering, Kyoto University
Professor Dr. Osamu Tabata
2. Low Cost Nano-Electro-Mechanical Sensing Platforms for Disposable Applications
Department of Electrical Engineering, IIT Bombay
Professor Dr. V. Ramgopal Rao
3. A Study of Deep RIE for Silicon MEMS Process
Research and Development Department, Samco Inc.
Dr. Taichi Hashimoto
4. Through Silicon Via (TSV) Process Using DRIE and Cathode Coupled PECVD
Research and Development Department, Samco Inc.
Yutaka Kusuda