Si rubber μTAS masters

Micro-TAS (Micro-Total Analysis Systems: μ-TAS) is a system in which a flow channel is formed on a glass or plastic substrate, either directly or by making a template using micronization technology, to analyze DNA or proteins by flowing them. The photo shows a Si chip with a photoresist (PR) structure attached to it, which can be transferred to Si rubber as a master to make Si rubber μTAS. In this case, a 2-5 μm wide and 5 μm deep channel was machined into the master Si chip using a parallel plate RIE system to form the μTAS channel.

Photo courtesy of Institute of Physical and Chemical Research

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