Application

Photonic Crystal

HOME > 應用 > 光子晶體

Manufacturing Process

GaAs 晶圓

Photonic Crystals

沉積AlGaAs

Photonic Crystals

沉積GaAs

Photonic Crystals

微影

Photonic Crystals

乾式蝕刻

RIE-101iPH

蝕刻光子晶體層

Photonic Crystals

乾式洗淨

UV-1 / UV-2

PC-300

清除光阻

Photonic Crystals

形成空氣橋
(濕式蝕刻)

Photonic Crystals

光子晶體波導

Photonic Crystals

CONTACT US

TECH NOTES

Back to Top