Plasma Cleaner PC-2000
Description
The PC-2000 is the latest iteration of Samco's parallel-plate batch plasma cleaner, an industry-proven platform with an installation base exceeding 500 units. This system is engineered for high-precision cleaning, ashing, and surface modification processes such as hydrophilization, serving a wide range of sectors including semiconductor packaging, wafer fabrication, optics, and biotechnology. By providing selectable processing modes—Plasma Etching (PE) and Reactive Ion Etching (RIE)—the equipment facilitates optimized processes tailored to specific substrate characteristics and technical requirements. The reaction chamber accommodates multiple electrode tiers, allowing for the simultaneous high-volume processing of diverse substrates ranging from miniature components to large-scale substrates up to 400 mm square. Additionally, integrated recipe and user management functionalities ensure operational consistency, supporting applications from laboratory research to industrial production.
Key Features and Benefits
- Process mode selection (PE, RIE) for optimal, device-specific processing.
- Flexible shelf electrode allows processing of a wide variety of samples in either RIE or Plasma Etching mode.
- Protective plate and O-ring seals ensure easy cleaning and maintenance.
- RF power utilization up to 900 W enhances productivity.
- Large 10.4-inch touch screen for simple and intuitive operation.
- Added Vdc, Vpp, matching position display, and event logging functions.
- Internally installed dry pump allows for significant reduction in footprint.
Applications
- Cleaning and surface modification of plastic packages such as BGA and CSP, and lead frames
- Hydrophilization of optical components and molds
- Photoresist ashing, stripping, and descumming
- DLC film stripping for mold refurbishment
- Surface modification and hydrophilization of microfluidics, cell culture dishes, and more
Options
- Allows for up to 3-stage processing with the addition of extra electrode shelves
- PC-based data logging capability
- Slow exhaust/Slow vent valve
