Plasma Cleaner PC-300
Compact plasma cleaner
Description
The PC-300 is a compact parallel-plate plasma cleaner designed for dry cleaning, ashing, descumming, and surface modification of semiconductor packaging substrates, optical components, electronic devices, biomedical products, and other precision components. By offering both Plasma Etching (PE) and Reactive Ion Etching (RIE) modes, the system enables optimized plasma treatment according to substrate material, geometry, and process requirements. Its multiple shelf electrode configuration supports flexible batch processing, making the PC-300 suitable for research, development, and low-volume production environments.
Key Features and Benefits
- Processing up to 320 mm x 230 mm
- Flexible shelf electrode allows the processing of a wide variety of samples in either RIE or Plasma Etching mode
- With its sleek, compact design, the PC-300 requires minimal space
- Fully automatic “one-button” operation with full manual override
- PLC controller with touch screen provides an intuitive graphical interface
- Dry pump and system layout allow for ease of maintenance
Applications
- Surface cleaning of plastic packages and lead-frames
- Precision cleaning of optical components and molds
- Surface modification (wettability and adhesion improvement)
- Photoresist ashing, stripping, and descuming
- Removal of organic contaminants
