ø100 nm nanopore
RIE plasma etching system RIE-10NR is used to fabricate nanopores of ø100 nm by processing SiN films in a well-shaped vertical position. Bacteria and viruses can be detected by deciphering the ion currents when biomolecules pass through the nanopore. If the nanopore device is realized, it is expected to be able to check the spread of viruses and bacteria with a simple test at airports, train stations and other places where people gather, thereby preventing their spread.
Photo courtesy of Taniguchi lab, Osaka university