Diamond-Like Carbon Coating System PD-100D
Dedicated for DLC Coating


The PD-100D is a plasma CVD system for DLC (Diamond-like Carbon) film formation with liquid and gas sources.

Thin and thick diamond-like hard carbon films can be formed in the ion sheath with high ion energy on the cathode side without heating the substrate.

Key Features and Benefits

High speed deposition is possible compared to the conventional sputtering method.

High hardness and low stress for both thin and thick films (20 to 30 μm).

Good film formation stability.

A wide range of film characteristics can be controlled.