Plasma Cleaner PC-1100
Versatile system
Description
The PC-1100 is a parallel-plate plasma cleaner to clean organic and inorganic contamination from the surface of samples.
The process chamber allows a user to install multiple electrode shelves, and the flexibility of shelf electrode configuration supports batch processing of a wide degree of products, from small electronic components to large substrates.
Key Features and Benefits
- Processing up to 400 mm x 400 mm
- Flexible shelf electrode allows the processing of a wide variety of samples in either RIE or Plasma Etching mode
- The process chamber can be configured with multiple large processing shelves to meet high volume production requirements
- Fully automatic “one-button” operation with full manual override
- PLC controller with touch screen provides an intuitive graphical interface
- Dry pump and system layout allow for ease of maintenance
- The reliable and durable system with a global installed base of more than 150 systems
Applications
- Surface cleaning of plastic packages and lead-frames
- Precision cleaning of optical components and molds
- Surface modification (wettability and adhesion improvement)
- Photoresist ashing, stripping, and descuming
- Removal of organic contaminants
