31 March 2025

Samco Delivers Advanced Cluster Tool System Cluster H™ to Tohoku University

Samco Inc. (TSE: 6387), has announced the delivery of its advanced cluster tool system, "Cluster H™," to Tohoku University in March 2025.

 

The primary objective of this equipment is to augment Tohoku University's research capabilities in materials science and process development. The system facilitates the continuous execution of multiple processes, including thin-film deposition, etching, surface treatment, and heat treatment, within a vacuum environment, thereby enabling efficient and state-of-the-art material development.

 

Since initiating the launch of Cluster H™ in December 2021, Samco has accumulated substantial experience and a substantial track record utilizing the system for product research and development. By integrating sophisticated plasma process technology with a vacuum transfer platform, Cluster H™ ensures high-quality thin-film deposition and precise etching. Furthermore, the system's modular architecture allows for flexible configuration adjustments tailored to specific user requirements.

 

Through this installation, Samco intends to reinforce its collaboration with Tohoku University, contributing to cutting-edge research and development. Additionally, the company will continue to foster partnerships with academic and research institutions to advance the development of leading-edge technologies.

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Samco's advanced cluster tool system " Cluster H™ ".

Company Contacts:

TSUCHIHASHI, Atsushi

PR & Marketing

+81-75-621-7841

tsuchihashi@samco.co.jp