Samco Inc. has expanded its system portfolio for the fabrication of InP (indium phosphide) laser diodes, waveguides, and photodiodes.Featuring ICP etching, CCP-RIE, PECVD, and ALD platforms compatible with 3-, 4-, and 6-inch wafers, Samco provides high-precision process solutions for optical communications and optoelectronic integration.
Background
InP-based laser diodes and photodiodes are essential components of high-speed, high-capacity optical communication systems. Demand for these devices is growing rapidly, particularly for optical transceivers used in AI data centers.
Advances in optoelectronic integration are also driving the dense integration of semiconductor and optical devices, creating a growing need for greater process accuracy, stability, and device reliability.
Key etching and deposition requirements for these devices include:
- DFB and DBR grating fabrication
- High-precision ridge formation
- High-precision lens fabrication
- Low-damage passivation film deposition
- High-step-coverage deposition on three-dimensional structures
These technological trends are increasing demand for flexible equipment configurations and highly reproducible process technologies that can support device development from R&D through volume production.
System Lineup
Samco offers the following systems optimized for InP device fabrication:
- ICP Etching System: RIE-600iPNC
- CCP-RIE System: RIE-2001LC
- PECVD System: PD-2201HLC
- ALD System: AD-8002LPC
These systems employ single-wafer processing and are compatible with 3-, 4-, and 6-inch wafers. By replacing selected internal chamber components, each platform can be configured to process multiple wafer sizes, providing flexibility for both research and production environments.
Their compact footprints also enable installation in cleanrooms where space is limited.
Future Outlook
Samco will continue to advance its process technologies for InP devices. By further improving process stability and reproducibility across its ICP etching, CCP-RIE, PECVD, and ALD platforms, Samco supports the volume production of advanced devices for optical communications and optoelectronic integration.
Through reliable equipment, extensive process expertise, and dedicated technical support, Samco aims to remain a trusted long-term partner in semiconductor device fabrication.
Contact Information
Samco Inc.
Public Relations and Marketing Department
Atsushi Tsuchihashi
Phone: +81-75-621-7841
Email: tsuchihashi@samco.co.jp