Aqua Plasma® Cleaners
Aqua Plasma® cleaners is a plasma treatment system that uses water vapor (H₂O) as a reactive gas. It performs metal oxide reduction, direct bonding, surface hydrophilization, and organic contaminant decomposition. Designed to support both fundamental research and industrial manufacturing lines, Samco Aqua Plasma® cleaners ensure consistent process repeatability for packaging and device fabrication workflows.
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Aqua Plasma® Cleaner AQ-2000
Handles A3 size and larger
Plasma Cleaners
Samco’s Plasma Cleaners utilize controlled, low-temperature gas discharge plasma to achieve thorough surface cleaning, organic residue removal, and surface energy alteration across electronic components, compound semiconductors, and optical devices. Operating with oxygen (O2), argon (Ar), or mixed gas configurations, these systems break down molecular-level organic contaminants and tailor substrate surface chemistry without altering bulk material properties. Designed to support both fundamental research and industrial manufacturing lines, Samco Plasma Cleaners ensure consistent process repeatability for packaging and device fabrication workflows.
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Plasma Cleaner PC-2000
Handles A3 size and larger
UV Ozone Cleaners
Samco’s UV-Ozone Cleaners utilize a controlled synergistic combination of short-wavelength ultraviolet (UV) light, high-concentration ozone (O3), and stage heating to perform high-precision dry surface treatment across semiconductor, display, and electronic device manufacturing lines. Operating under ambient pressure without reactive ionic species, these systems break down molecular-level organic contaminants from silicon wafers, compound semiconductor substrates, glass, and metallic electrodes without causing physical plasma damage or electrostatic charge buildup. Designed to support both fundamental laboratory R&D and high-throughput production environments, Samco UV-Ozone Cleaners deliver highly repeatable surface activation and wettability enhancement.
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UV Ozone Cleaner UV-1
Compact Desktop System
