Application

Power Device

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Manufacturing Process

MOCVD

外延生長

Power Devices

電漿CVD

PD-220LC

PD-220NL

形成光罩

Power Devices

曝光/顯影

Power Devices

蝕刻SiO2

Power Devices

崁入離子並退火

Power Devices

清除光罩

Power Devices

電漿CVD

PD-220LC

PD-220NL

沉積SiO2

Power Devices

曝光/顯影

Power Devices

蝕刻SiO2

Power Devices

乾式蝕刻

RIE-200iPC

RIE-101iPH

蝕刻SiC

Power Devices

清除SiO2

Power Devices

電漿CVD

PD-220LC

PD-220NL

沉積SiO2薄膜

Power Devices

曝光/顯影

Power Devices

乾式蝕刻

RIE-200iPC

RIE-101iPH

蝕刻SiO2薄膜

Power Devices

形成電極

Power Devices

功率晶體管

Power Devices

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