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Process Flow

藍寶石基板               

清洗基板

LED

乾式蝕刻

RIE-330iPC

圖形化藍寶石基板(PSS)

LED

MOCVD

沉積p-GaN/Active/n-GaN層

LED

曝光/顯影

LED

乾式蝕刻

RIE-330iPC

蝕刻使n-GaN層露出

LED

形成電極

LED

乾式蝕刻

RIE-330iPC

蝕刻以分離各部件

LED

電漿CVD

PD-3800L

沉積鈍化層

LED

曝光/顯影

LED

乾式蝕刻

RIE-200ipc

蝕刻接觸孔

LED

切割

乾式洗淨

PXA-100

打線

LED

乾式洗淨

PXA-100

封裝前洗淨磷光

LED

LED

LED

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