2 March 2022

Samco Opens Research Center for Nano Thin Films & Materials to accelerate ALD Development

Samco, a leading manufacturer of etching, deposition and surface treatment processing equipment for the semiconductor and related industries and academic facilities, has opened the new Research Center for Nano Thin Films & Materials for ALD and mist CVD process and system development in Kyoto, Japan.

Research Center for Nano Thin Films & Materials.JPG
Research Center for Nano Thin Films & Materials (building area: 413.90 m2)


In recent years, the demand for ALD systems has been expanding for semiconductor and electronic device applications, and new markets are emerging in medical and healthcare fields such as coating technology for containers and medical devices. To meet growing market needs and with the aim of entering new markets in the future, Samco Inc. reorganized its former Basic Technology Research Center and established the Research Center for Nano Thin Films & Materials (Here in after Research Center). It has a building area of 413.90 m2 and is equipped with deposition systems for demonstrations and various measurement tools for evaluation.

"The Research Center focuses on the development of thin film deposition systems and process technologies, as well as basic research on thin film properties and physical properties evaluation," said Osamu Tsuji, the founder and CEO of Samco Inc. "We already have an extensive track record with ALD equipment, which we began selling in 2015 in the fields of semiconductor and electronic devices. Our next plan is to develop new ALD systems for medical and healthcare applications such as barrier films, coating films, medical materials, and coating of implant materials."

Samco plans to increase its number of researchers at the Research Center from the current 8 to 20 in the next 3 years and to expand its annual ALD systems sales to 3 billion yen in five years.

About Samco Inc.

Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, and is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-three years, more than 4,300 Samco systems have been installed and used in 35 different countries. Samco's equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including high-frequency filters, SiC/GaN power devices, GaAs VCSELs, micro-OLED/LED, CMOS image sensors, MEMS, TSVs, advanced packaging, and so on. Learn more at https://www.samco.co.jp/en/

Company Contacts:

TSUCHIHASHI, Atsushi

Public Relations

Phone: 81-75-621-7841

E-mail: tsuchihashi@samco.co.jp