19 May 2021

Kyoto University Selects Samco's Thermal ALD System for Perovskite Solar Cells

Samco has delivered ALD (Atomic Layer Deposition) system for perovskite solar cells to Wakamiya Laboratory, Kyoto University Institute for Chemical Research. Perovskite solar cells are attracting worldwide attention as the next generation of solar cells with high photoelectric conversion efficiency.

The thermal ALD system (Model AL-1WG) has an efficient reaction chamber structure with a smaller volume and reduced gas consumption. This open-load system is equipped with a glove box, allowing sample loading and unloading without exposure to the atmosphere.

Model: AL-1WG
Size: 1,680 mm (W) x 1,433 mm (D) x 2,182 mm (H)
Sample size: ø230 mm (1 x ø8 inch wafer, 3 x ø4 inch wafers)


Based on our management philosophy of "Better tomorrow driven by the thin film technology", Samco will contribute to the creation of a sustainable society.

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[E-mail] koho@samco.co.jp